Setup of a confocal nanoscope in reflection using a super-oscillatory lens

Arvind Nagarajan; Marijn Siemons; L. Pjotr Stoevelaar; Fabrizio Silvestri; Venu Gopal Achanta; Stefan M. B. Bäumer; Giampiero Gerini

doi:10.1117/12.2528717

3 September 2019 Setup of a confocal nanoscope in reflection using a super-oscillatory lens

Arvind Nagarajan, Marijn Siemons, L. Pjotr Stoevelaar, Fabrizio Silvestri, Venu Gopal Achanta, Stefan M. B. Bäumer, Giampiero Gerini

Author Affiliations +

Proceedings Volume 11089, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI; 110892E (2019) https://doi.org/10.1117/12.2528717
Event: SPIE Nanoscience + Engineering, 2019, San Diego, California, United States

Abstract

In this paper, we discuss the setup of a confocal nanoscope in reflection using a super-oscillatory lens (SOL)which offers a sub-diffracted focal spot with an ultra-short depth of focus (≈100 nm). A tolerance of 20 nm defocussing in a 10 μm travel range is thus necessary, translating to an alignment requirement of the stage, with respect to the optical axis, below 2 mrad. We discuss an iterative procedure to fine tune the stage movement to achieve this requirement. We also demonstrate the necessity of the alignment by imaging a 5μm long 1D array of rectangular shaped Au nanostructures with a periodicity of 500 nm

Citation Download Citation

Arvind Nagarajan, Marijn Siemons, L. Pjotr Stoevelaar, Fabrizio Silvestri, Venu Gopal Achanta, Stefan M. B. Bäumer, and Giampiero Gerini "Setup of a confocal nanoscope in reflection using a super-oscillatory lens", Proc. SPIE 11089, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI, 110892E (3 September 2019); https://doi.org/10.1117/12.2528717

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