Influence of grinding force on aspherical small-scale waviness uniformity based on parallel grinding

Qiancai Wei; Lian Zhou; Xianhua Chen; Nan Zheng; Jian Wang

doi:10.1117/12.2524257

10 May 2019 Influence of grinding force on aspherical small-scale waviness uniformity based on parallel grinding

Qiancai Wei, Lian Zhou, Xianhua Chen, Nan Zheng, Jian Wang

Proceedings Volume 11068, Second Symposium on Novel Technology of X-Ray Imaging; 1106817 (2019) https://doi.org/10.1117/12.2524257
Event: Second Symposium on Novel Technology of X-Ray Imaging, 2018, Hefei, China

Abstract

Aiming at the problem of poor uniformity and large amplitude of aspherical small-scale waviness caused by grinding aspheric surface by traditional grating parallel grinding technology, in this paper, the reasons for the poor uniformity of aspherical small-scale waviness in traditional grating parallel grinding technology are analyzed from the perspective of grinding force. Considering the influence of the uniformity of the grinding force during the grinding process on the aspherical small-scale waviness, an up-grinding grating parallel grinding method and a down-grinding grating parallel grinding method are proposed. The effects of the grinding force of the two grinding methods on the aspherical small-scale waviness uniformity are analyzed experimentally. Finally, among these three grating parallel grinding methods, the aspherical small-scale waviness obtained by the down-grinding grating parallel grinding method is the most uniform and the waviness amplitude is the smallest, the waviness amplitude is less than 2μm.

Citation Download Citation

Qiancai Wei, Lian Zhou, Xianhua Chen, Nan Zheng, and Jian Wang "Influence of grinding force on aspherical small-scale waviness uniformity based on parallel grinding", Proc. SPIE 11068, Second Symposium on Novel Technology of X-Ray Imaging, 1106817 (10 May 2019); https://doi.org/10.1117/12.2524257

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