A method for improving the accuracy of an extinction coefficient measurement of weakly absorbing interference layers

Van Ba Nguyen; Ludmila Aleksandrovna Gubanova; Dinh Bao D. B. Bui

doi:10.1117/12.2525068

21 June 2019 A method for improving the accuracy of an extinction coefficient measurement of weakly absorbing interference layers

Van Ba Nguyen, Ludmila Aleksandrovna Gubanova, Dinh Bao D. B. Bui

Author Affiliations +

Proceedings Volume 11057, Modeling Aspects in Optical Metrology VII; 110571M (2019) https://doi.org/10.1117/12.2525068
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

A method of measuring the dimensionless extinction coefficient for optical thin-film layers of weakly absorbing filmforming materials using a parallelepiped form attachment is presented. The attachment uses frustrated total internal reflection to multiply radiation losses in tested thin film layers. Influences of some main factors on accuracy of the method have been studied and the results show that those influences can be compensated and as the result of it the measurement error can be reduced to 1%.

Citation Download Citation

Van Ba Nguyen, Ludmila Aleksandrovna Gubanova, and Dinh Bao D. B. Bui "A method for improving the accuracy of an extinction coefficient measurement of weakly absorbing interference layers ", Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 110571M (21 June 2019); https://doi.org/10.1117/12.2525068

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