Two-dimensional reflective optical encoder based on point source illuminated grating imaging

Hang Chen; Jian Wang; Yue Gao; Cheng-Chih Hsu; Peng Jin; Jie Lin

doi:10.1117/12.2511441

7 March 2019 Two-dimensional reflective optical encoder based on point source illuminated grating imaging

Hang Chen, Jian Wang, Yue Gao, Cheng-Chih Hsu, Peng Jin, Jie Lin

Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 1105313 (2019) https://doi.org/10.1117/12.2511441
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China

Abstract

A novel two-dimensional reflective grating encoder is introduced. The optical encoder is developed by a binary amplitude reflective scale grating and a two-dimensional slit displacement sensor, which is fabricated by MEMS technology. Based on Talbot effort, the proposed method can achieve millimetric measurement with high accuracy, where the displacement difference within 0.1% and 0.2% for 1 mm and 20 mm measurement, respectively. By using the eight-segment data division program, the proposed method can easily distinguish 1 μm displacement measurement. Furthermore, in measurement speed tests, the proposed method can reach the movement speed about 5000 μm/s. The experimental results showed the proposed method can achieve high resolution, high speed and long-range measurement, which is potential in the industries and workshops application.

Citation Download Citation

Hang Chen, Jian Wang, Yue Gao, Cheng-Chih Hsu, Peng Jin, and Jie Lin "Two-dimensional reflective optical encoder based on point source illuminated grating imaging", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 1105313 (7 March 2019); https://doi.org/10.1117/12.2511441

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