High-resolution displacement sensor based on variable spacing grating

Xiaoxiao Wang; Zhiguo Zhang; Luming Li; Jiangxing Chen

doi:10.1117/12.2519612

14 February 2019 High-resolution displacement sensor based on variable spacing grating

Xiaoxiao Wang, Zhiguo Zhang, Luming Li, Jiangxing Chen

Proceedings Volume 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018); 110483S (2019) https://doi.org/10.1117/12.2519612
Event: 17th International Conference on Optical Communications and Networks (ICOCN2018), 2018, Zhuhai, China

Abstract

Compared with the traditional electromagnetic displacement sensor, the optical sensor has the advantages of reduced size and anti-electromagnetic interference. The increasing demand for high-resolution displacement sensors in today's production and research environments has led to the rapid development of variable spacing grating displacement sensors. The principle of variable spacing grating displacement sensor is verified by experiments, and the reliability of the sensor is proved. Based on the theoretical analysis of the linear density formula of variable spacing grating, we proposes a new displacement sensor optimization method. The method is demonstrated by a series of experiments. The main component of the displacement sensor adopts a variable spacing blazed grating in order to concentrate on the first energy level by the energy of the grating diffraction to improve diffraction efficiency. This paper analyzes the correlation between the resolution of the displacement sensor and the resolution of the grating and the resolution of the spectrometer and by experiment we further prove that the smaller the grating spacing is, the stronger the resolution of the grating. Theoretical analysis shows that by increasing the grating spacing variation, the linear density formulas of the variable spacing gratings can be optimized to achieve a 50mm range 0.02mm resolution

Citation Download Citation

Xiaoxiao Wang, Zhiguo Zhang, Luming Li, and Jiangxing Chen "High-resolution displacement sensor based on variable spacing grating", Proc. SPIE 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018), 110483S (14 February 2019); https://doi.org/10.1117/12.2519612

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
5 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Sensors

Diffraction gratings

Spectroscopy

Diffraction

Optical fibers

Analytical research

Optical resolution

Show All Keywords

Keywords/Phrases

Search In:

Publication Years