Paper
14 February 2019 Study on graphene heater electrode silicon nitride waveguide phase shifters
Ziyu Liu, Qiang Zhao
Author Affiliations +
Proceedings Volume 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018); 110483A (2019) https://doi.org/10.1117/12.2523005
Event: 17th International Conference on Optical Communications and Networks (ICOCN2018), 2018, Zhuhai, China
Abstract
In this paper, we studied the silicon nitride waveguide phase modulator using graphene as a heating electrode. We demonstrate the advantages of graphene heater waveguide phase shifter by comparative simulation, The effect of the length and the width of the heating electrode on the thermal phase modulating efficiency was also been studied. Finally, by covering the graphene heating electrode directly on the waveguide, we obtained a low-power thermal-adjustable phase shifter with a π-phase shift modulation power of 96.8mW.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ziyu Liu and Qiang Zhao "Study on graphene heater electrode silicon nitride waveguide phase shifters", Proc. SPIE 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018), 110483A (14 February 2019); https://doi.org/10.1117/12.2523005
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KEYWORDS
Electrodes

Waveguides

Graphene

Phase shift keying

Silicon

Aluminum

Modulation

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