1.3 μm laterally-coupled distributed feedback laser with a triangular prism etched facet

Q. C. Wang; J. Wang; Y. Q. Wang; C. Z. Sun; B. Xiong; Y. Luo; Z. B. Hao; Y. J. Han; L. Wang; H. T. Li

doi:10.1117/12.2517896

12 March 2019 1.3μm laterally coupled distributed feedback laser with a triangular prism etched facet

Q. C. Wang, J. Wang, Y. Q. Wang, C. Z. Sun, B. Xiong, Y. Luo, Z. B. Hao, Y. J. Han, L. Wang, H. T. Li

Proceedings Volume 11023, Fifth Symposium on Novel Optoelectronic Detection Technology and Application; 110233Z (2019) https://doi.org/10.1117/12.2517896
Event: Fifth Symposium on Novel Optoelectronic Detection Technology and Application, 2018, Xi'an, China

Abstract

The distributed feedback (DFB) laser is a key component for fiber communication due to its single-mode performance, but it usually requires complex and expensive regrowth after grating definition. The laterally-coupled distributed feedback (LC-DFB) laser has the advantage of a simple fabrication process without epitaxial regrowth, but the LC-DFB laser usually has a low coupling coefficient as the optical feedback is provided by the evanescent field and Fabry-Parot (FP) longitudinal modes arise from the pair of parallel cleaved facets. In this work, a triangular prism etched facet is proposed to suppress the FP longitudinal modes from cleaved facets of a 1.3 μm LC-DFB laser. The length-width ratio of a triangular prism facet is optimized on the compromise between the reflection and length by finite difference time domain (FDTD) method. The vertical etched facet with depth of 4 μm and tip curvature of 100 nm and the lateral gratings with depth of 1.8 μm and gap of 200 nm are fabricated by inductively coupled plasma (ICP) etching with the gas mixtures of Cl₂/CH₄/Ar and CH₄/H₂/Ar, respectively. The FP longitudinal modes of the etched-facet laterally-coupled distributed feedback (EF-LC-DFB) laser are effectively suppressed compared to the counterpart of cleaved facets, and the stable single-mode operation of EF-LC-DFB is demonstrated with the side mode suppression ratio (SMSR) of 54.35 dB.

Citation Download Citation

Q. C. Wang, J. Wang, Y. Q. Wang, C. Z. Sun, B. Xiong, Y. Luo, Z. B. Hao, Y. J. Han, L. Wang, and H. T. Li "1.3μm laterally coupled distributed feedback laser with a triangular prism etched facet", Proc. SPIE 11023, Fifth Symposium on Novel Optoelectronic Detection Technology and Application, 110233Z (12 March 2019); https://doi.org/10.1117/12.2517896

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KEYWORDS

Prisms

Waveguides

Etching

Plasma etching

Reflectivity

Semiconducting wafers

Distributed feedback laser diodes

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