A high-precision and small-volume stepping displacement microplatform for focusing ion beam etching of optical antenna

Junjie Meng; Xinjie Han; Wanwan Dai; Zhaowei Xin; Dong Wei; Xinyu Zhang; Haiwei Wang; Changsheng Xie

doi:10.1117/12.2505957

15 November 2018 A high-precision and small-volume stepping displacement microplatform for focusing ion beam etching of optical antenna

Junjie Meng, Xinjie Han, Wanwan Dai, Zhaowei Xin, Dong Wei, Xinyu Zhang, Haiwei Wang, Changsheng Xie

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Proceedings Volume 10964, Tenth International Conference on Information Optics and Photonics; 109643M (2018) https://doi.org/10.1117/12.2505957
Event: Tenth International Conference on Information Optics and Photonics (CIOP 2018), 2018, Beijing, China

Abstract

To focusing ion beam etching (FIB) machine, the maximum effective processing size in x- and y-direction is still in ~100 micron scale during a single manufacturing cycle, generally. Considering the performances of existing equipments, it is a core operation that a high-precision and small-volume stepping displacement microplatform with a larger manufacturing size of more than that of existing equipments, is constructed effectively for fabricating optical antenna with a size in centimeter scale. The designed setup can be used to conduct a two-dimensional displacement with very high precision of few tens of nanometers for processing sample with structural size scope in centimeter level or even more, is to attach to the working plate of the FIB machine. In this paper, the 80C51 single-chip microcomputer is used as the control setup. Based on the analysis of the three closed-loop DC speed regulation system, the key parameters of the controller are designed according to the dynamic and static performance indicators of the system. Using Matlab's Simulink and Power System toolbox, a three-mode closed-loop DC speed control system for positioning and current generating is built. The model and the key parameter setting of the positioning loop, the speed loop and the current generating loop, are introduced. The simulation model and results of the DC reversible speed control system are given. The simulations verify the model, which can be effectively utilized to correct the parameter setting. It should be noted that the current change rate is suppressed while maintaining a maximum allowable changing rate, so as to make the entire current waveform being closer to the ideal waveform.

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Junjie Meng, Xinjie Han, Wanwan Dai, Zhaowei Xin, Dong Wei, Xinyu Zhang, Haiwei Wang, and Changsheng Xie "A high-precision and small-volume stepping displacement microplatform for focusing ion beam etching of optical antenna", Proc. SPIE 10964, Tenth International Conference on Information Optics and Photonics, 109643M (15 November 2018); https://doi.org/10.1117/12.2505957

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KEYWORDS

Control systems

Control systems design

Etching

Ion beams

Optical antennas

Nano opto mechanical systems

Automatic control

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