New silicon hard mask material development for sub-5nm node

Tomoaki Seko; Tatsuya Kasai; Ryuuichi Serizawa; Satoshi Dei; Tatsuya Sakai

doi:10.1117/12.2518785

26 March 2019 New silicon hard mask material development for sub-5nm node

Tomoaki Seko, Tatsuya Kasai, Ryuuichi Serizawa, Satoshi Dei, Tatsuya Sakai

Proceedings Volume 10960, Advances in Patterning Materials and Processes XXXVI; 1096025 (2019) https://doi.org/10.1117/12.2518785
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

New spin-on silicon hard mask (Si-HM) material containing Si-C structure in main chain was developed to meet EUV lithography performance, etch requirements and non-lithography patterning applications at sub 5 nm node. New Si-HM material can be used as an alternative to traditional polysiloxane Si-HM. It showed 2.5X high resistance for oxygen etching compared to polysiloxane Si-HM structure due to low electronegative gap and higher silicon content. It can be chemically modified with various functional units, and photoresist adhesion control would be expected to improve. We also observed sensitivity improvement from EUV lithography tri-layer patterning process including new Si-HM. Wet strip-ability with DHF and refractive index at 193 nm were changed significantly for this new Si-HM before and after UV irradiation under air. It also showed excellent gap-fill performance at narrow pattern dimensions on our patterned wafers.

Citation Download Citation

Tomoaki Seko, Tatsuya Kasai, Ryuuichi Serizawa, Satoshi Dei, and Tatsuya Sakai "New silicon hard mask material development for sub-5nm node", Proc. SPIE 10960, Advances in Patterning Materials and Processes XXXVI, 1096025 (26 March 2019); https://doi.org/10.1117/12.2518785

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