ToF-SIMS analysis of antimony carboxylate EUV photoresists

Michael Murphy; Shaheen Hasan; Steven Novak; Greg Denbeaux; Robert L. Brainard

doi:10.1117/12.2516011

27 March 2019 ToF-SIMS analysis of antimony carboxylate EUV photoresists

Michael Murphy, Shaheen Hasan, Steven Novak, Greg Denbeaux, Robert L. Brainard

Proceedings Volume 10960, Advances in Patterning Materials and Processes XXXVI; 1096010 (2019) https://doi.org/10.1117/12.2516011
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) is used to evaluate the composition of nonvolatile photoproducts created by EUV photolysis of antimony carboxylate photoresists [R₃Sb(O₂CR′)₂]. Dozens of potential photoproduct ions were identified using exact mass and ¹²¹Sb/¹²³Sb isotopic ratios. Several oxygen-rich antimony ions were found to increase in abundance with exposure. Two methods were employed to identify photoproducts which create solubility contrast. First, samples were analyzed pre- and post-development to examine the effects of EUV exposure and developer solvent on secondary ion intensity. Secondly, changes in intensity of select ions were compared to dissolution contrast over a range of doses. Through these studies, ion intensities were found to correlate with dissolution contrast for several fragments, indicating their active role in creating negative-tone response.

Conference Presentation

Citation Download Citation

Michael Murphy, Shaheen Hasan, Steven Novak, Greg Denbeaux, and Robert L. Brainard "ToF-SIMS analysis of antimony carboxylate EUV photoresists", Proc. SPIE 10960, Advances in Patterning Materials and Processes XXXVI, 1096010 (27 March 2019); https://doi.org/10.1117/12.2516011

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available