Large 1D and 2D micro-mirror arrays for universe and Earth observation

Frederic Zamkotsian; Yves Petremand; Patrick Lanzoni; Sebastien Lani; Rudy Barette; Branislav Timotijevic; Michel Despont

doi:10.1117/12.2513287

4 March 2019 Large 1D and 2D micro-mirror arrays for universe and Earth observation

Frederic Zamkotsian, Yves Petremand, Patrick Lanzoni, Sebastien Lani, Rudy Barette, Branislav Timotijevic, Michel Despont

Author Affiliations +

Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 1093103 (2019) https://doi.org/10.1117/12.2513287
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

In future space missions for Universe and Earth Observation, scientific return could be optimized using MOEMS devices. Large micromirror arrays (MMA) are used for designing new generation of instruments. In Universe Observation, multi-object spectrographs (MOS) are powerful tools for space and ground-based telescopes for the study of the formation and evolution of galaxies. This technique requires a programmable slit mask for astronomical object selection; 2D micromirror arrays are perfectly suited for this task. In Earth Observation, removing dynamically the straylight at the entrance of spectrographs could be obtained by using a Smart Slit, composed of a 1D micro-mirror array as a gating device. We are currently engaged in a European development of micro-mirror arrays, called MIRA, exhibiting remarkable performances in terms of surface quality as well as ability to work at cryogenic temperatures. MMA with 100 × 200 μm² single-crystal silicon micromirrors were successfully designed, fabricated and tested down to 162 K. In order to fill large focal planes (mosaicing of several chips), we are currently developing large micromirror arrays to be integrated with their electronics. 1D and 2D arrays are built on wafer with Through Wafer Vias in order to allow routing of the device on wafer backside, foreseeing integration with dedicated ASICs. The yield of these devices as well as contrast enhancement have been successfully implemented.

Citation Download Citation

Frederic Zamkotsian, Yves Petremand, Patrick Lanzoni, Sebastien Lani, Rudy Barette, Branislav Timotijevic, and Michel Despont "Large 1D and 2D micro-mirror arrays for universe and Earth observation", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 1093103 (4 March 2019); https://doi.org/10.1117/12.2513287

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