Germanium ion implantation for trimming the coupling efficiency of silicon racetrack resonators

Milan M. Milosevic; Xingshi Yu; Xia Chen; Ozan Aktas; Swe Zin Oo; Ali Z. Khokhar; David J. Thomson; Harold M. H. Chong; Anna C. Peacock; Shinichi Saito; Graham T. Reed

doi:10.1117/12.2508805

4 March 2019 Germanium ion implantation for trimming the coupling efficiency of silicon racetrack resonators

Milan M. Milosevic, Xingshi Yu, Xia Chen, Ozan Aktas, Swe Zin Oo, Ali Z. Khokhar, David J. Thomson, Harold M. H. Chong, Anna C. Peacock, Shinichi Saito, Graham T. Reed

Author Affiliations +

Proceedings Volume 10923, Silicon Photonics XIV; 109230R (2019) https://doi.org/10.1117/12.2508805
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

In recent years, we have presented results on the development of a variety of silicon photonic devices such as erasable gratings and directional couplers, tunable resonators and Mach-Zehnder interferometers, and programmable photonic circuits using germanium ion implantation and localised laser annealing. In this paper we have carried out experiments to analyse a series of devices that can be fabricated using the same technology, particularly silicon-on-insulator racetrack resonators which are very sensitive to fabrication imperfections. Simulation and experimental results revealed the ability to permanently optimise the coupling efficiency of these structures by selective localised laser annealing.

Conference Presentation

Citation Download Citation

Milan M. Milosevic, Xingshi Yu, Xia Chen, Ozan Aktas, Swe Zin Oo, Ali Z. Khokhar, David J. Thomson, Harold M. H. Chong, Anna C. Peacock, Shinichi Saito, and Graham T. Reed "Germanium ion implantation for trimming the coupling efficiency of silicon racetrack resonators", Proc. SPIE 10923, Silicon Photonics XIV, 109230R (4 March 2019); https://doi.org/10.1117/12.2508805

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available