Fiber grating coupler development for Si-photonics process design kits at CEA-LETI

Daivid Fowler; Philippe Grosse; Fabien Gays; Bertrand Szelag; Charles Baudot; Nathalie Vuillet; Jonathon Planchot; Frederic Boeuf

doi:10.1117/12.2511845

4 March 2019 Fiber grating coupler development for Si-photonics process design kits at CEA-LETI

Daivid Fowler, Philippe Grosse, Fabien Gays, Bertrand Szelag, Charles Baudot, Nathalie Vuillet, Jonathon Planchot, Frederic Boeuf

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Proceedings Volume 10922, Smart Photonic and Optoelectronic Integrated Circuits XXI; 1092205 (2019) https://doi.org/10.1117/12.2511845
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

Various aspects of grating coupler development are presented to illustrate how the performance and yield of this key component of our silicon photonics platform has improved over recent years. The device design concept, fabrication and testing are discussed in order to give a more general insight into the challenges faced in increasing the maturity level of silicon photonics platforms. In particular, we will highlight some key areas in which tools and solutions developed for the CMOS electronics industry have proven inapplicable in the case of photonics, requiring that established methods be heavily modified or replaced.

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Daivid Fowler, Philippe Grosse, Fabien Gays, Bertrand Szelag, Charles Baudot, Nathalie Vuillet, Jonathon Planchot, and Frederic Boeuf "Fiber grating coupler development for Si-photonics process design kits at CEA-LETI", Proc. SPIE 10922, Smart Photonic and Optoelectronic Integrated Circuits XXI, 1092205 (4 March 2019); https://doi.org/10.1117/12.2511845

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