Lithographic Replication Of Compact Disk Structures

Robert E. Revay; Philippe Briaud

doi:10.1117/12.953180

25 July 1989 Lithographic Replication Of Compact Disk Structures

Robert E. Revay, Philippe Briaud

Proceedings Volume 1088, Optical/Laser Microlithography II; (1989) https://doi.org/10.1117/12.953180
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

Conventional UV photolithography has been applied to the replication of glass compact disk structures for low cost fabrication of grooved glass substrates and ruggedized CD-ROM and CD-AUDIO disks. Unconventional pattern generation and replication strategies have been employed to produce high quality compact disk structures in soda-lime glass substrates.

Citation Download Citation

Robert E. Revay and Philippe Briaud "Lithographic Replication Of Compact Disk Structures", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); https://doi.org/10.1117/12.953180

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