Krypton Fluoride Excimer Laser for Microlithography

R. L. Sandstrom; R. P. Akins; U. K. Sengupta; C. Reiser; D. G. Larson; S. L. Anderson

doi:10.1117/12.953169

25 July 1989 Krypton Fluoride Excimer Laser for Microlithography

R. L. Sandstrom, R. P. Akins, U. K. Sengupta, C. Reiser, D. G. Larson, S. L. Anderson

Proceedings Volume 1088, Optical/Laser Microlithography II; (1989) https://doi.org/10.1117/12.953169
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

We present the design concepts and performance data for a spectrally-narrowed, wavelength-stabilized KrF laser that meets the specialized requirements of a deep-UV light source for a stepper. Features include: (1) compact size (54cm W x 45cm H x 128cm L), (2) 3 Watt average power with spectral width of 0.003 nm FWHM, (3) long fuel gas life from premixed bottles attained without the need for a gas reprocessor or boost gas, (4) fast and precise wavelength control system that maintains a user-specifiable wavelength to within 0.0005 nm anywhere in the KrF tuning range, (5) microprocessor control, including SECS or custom control protocols, (6) robust, modular internal design for rapid repair, and (7) engineering and packaging that meets semiconductor production tool safety requirements.

Citation Download Citation

R. L. Sandstrom, R. P. Akins, U. K. Sengupta, C. Reiser, D. G. Larson, and S. L. Anderson "Krypton Fluoride Excimer Laser for Microlithography", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); https://doi.org/10.1117/12.953169

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available