Advanced Manufacturing Techniques As Applied To ASIC Photolithographic Processing

Daniel C. Carter; Brian P. Bystedt

doi:10.1117/12.953099

19 July 1989 Advanced Manufacturing Techniques As Applied To ASIC Photolithographic Processing

Daniel C. Carter, Brian P. Bystedt

Proceedings Volume 1087, Integrated Circuit Metrology, Inspection, and Process Control III; (1989) https://doi.org/10.1117/12.953099
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

An advanced manufacturing photolithographic process has been developed and implemented. Utilizing conventional processing techniques the process demonstrates high levels of consistency and uniformity while maintaining simplicity. The 1.5 micron process as monitored by electrical metrology techniques has demonstrated long term consistency of exposure latitude and critical dimension uniformity. All aspects of processing including coat, expose, develop and etch contribute to a total variation of less than 10% of nominal linewidth. Statistical process control combined with equipment matching has facilitated process standardization and allows for the elimination of all pilots and set-up wafers bringing high throughput ASIC manufacturing to a reality.

Citation Download Citation

Daniel C. Carter and Brian P. Bystedt "Advanced Manufacturing Techniques As Applied To ASIC Photolithographic Processing", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); https://doi.org/10.1117/12.953099

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available