Development of an integrated freeform optics measurement system based on phase measuring deflectometry

Xinjun Wan; Boyi Bin; Shuping Xie; Song Lv; Songlin Zhuang

doi:10.1117/12.2505705

12 December 2018 Development of an integrated freeform optics measurement system based on phase measuring deflectometry

Xinjun Wan, Boyi Bin, Shuping Xie, Song Lv, Songlin Zhuang

Proceedings Volume 10847, Optical Precision Manufacturing, Testing, and Applications; 1084710 (2018) https://doi.org/10.1117/12.2505705
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China

Abstract

In this paper we will present the development of an integrated freeform optics profile measurement system based on the Phase Measuring Deflectometry (PMD) principle. The developed system can measure freeform optics with an aperture size as large as ~300mm and the slope angle range up to +/-20 degrees. The measurement absolute accuracy is currently around +/-1μm, but it can measure the high order surface profile error with accuracy below 0.1μm. The measurement process is non-contact, quick (the image capturing time less than 1 second), full 3D and easy to setup (no precise alignment required). The whole integrated system is easy to be deployed at the production site.

Citation Download Citation

Xinjun Wan, Boyi Bin, Shuping Xie, Song Lv, and Songlin Zhuang "Development of an integrated freeform optics measurement system based on phase measuring deflectometry", Proc. SPIE 10847, Optical Precision Manufacturing, Testing, and Applications, 1084710 (12 December 2018); https://doi.org/10.1117/12.2505705

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