8 x 8 format InGaAs/InP avalanche photodiode plane array for 3D imaging laser radar system

Shuai Wang; Qin Han; Lili Hou; Han Ye; Ziqing Lu

doi:10.1117/12.2504875

8 February 2019 8×8 format InGaAs/InP avalanche photodiode plane array for 3D imaging laser radar system

Shuai Wang, Qin Han, Lili Hou, Han Ye, Ziqing Lu

Proceedings Volume 10843, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging; 1084304 (2019) https://doi.org/10.1117/12.2504875
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

This paper reports a planar structure InGaAs/InP avalanche photodetector focal plane arrays. Their material structure use separate absorption, grading, charge and multiplication layer. The pixel pitch of 8×8 format detectors is 250 μm. The breakdown voltage (VBD) is typically in the range of 65 to 70 V for most of the devices on the same wafer. The typical dark current at 90% of V_BD is 3 nA, dark currents as low as 0.5 nA at 90% of V_BD have also been observed for some diodes, corresponding to a dark current density of 1 × 10^-5 A/cm². The photocurrent starts to increase at the "punch-through" voltage V_p of 43 V. The responsivity at 1.55 μm is 0.91 A/W at unity gain and the multiplication layer is estimated to be 1.2 μm. Each device on the same wafer has excellent characteristics and high uniformity through measurement, laying a solid foundation for 3D imaging laser radar systems.

Citation Download Citation

Shuai Wang, Qin Han, Lili Hou, Han Ye, and Ziqing Lu "8×8 format InGaAs/InP avalanche photodiode plane array for 3D imaging laser radar system", Proc. SPIE 10843, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging, 1084304 (8 February 2019); https://doi.org/10.1117/12.2504875

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KEYWORDS

Diffusion

Staring arrays

Imaging systems

Avalanche photodiodes

LIDAR

Laser systems engineering

Zinc

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