Study on the particles classification control of CeO2 polishing powder

Lingyan Jiao; Ying Cui; Zhuo Chen; Yuzhu Jin; Nana Lin

doi:10.1117/12.2506382

16 January 2019 Study on the particles classification control of CeO₂ polishing powder

Lingyan Jiao, Ying Cui, Zhuo Chen, Yuzhu Jin, Nana Lin

Proceedings Volume 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 108381J (2019) https://doi.org/10.1117/12.2506382
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Aiming at the problem that the surface defects of the substrate, which are caused by the large size and uneven distribution of the polishing powder, the screening and classification of cerium oxide polishing powder was studied. The screening method of water dispersion was adopted. The impacts of the dispersion method, dispersion parameters, screening number, the concentration of polishing powder and settling time on the size and uniformity of the polishing powder were studied. The appropriate technological process and process parameters were determined by experimental study. The control over the granularity and uniformity of polishing powder was realized. Morphology of the polishing powders was studied by using SEM and granularity of powders was measured by laser granularity analyzer. The particle size of the polishing powder after screening is D (0.5) =1.6μm~1.8μm. The width of the particle size distribution is not over 3.3μm (D (0.9) ~D (0.1)). By the tests of white light interferometer, Ra of the ultra-smooth surface polished with the filtered cerium oxide is no higher than 0.3nm.

Citation Download Citation

Lingyan Jiao, Ying Cui, Zhuo Chen, Yuzhu Jin, and Nana Lin "Study on the particles classification control of CeO₂ polishing powder", Proc. SPIE 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 108381J (16 January 2019); https://doi.org/10.1117/12.2506382

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