Characterizing the resolving power of laser Fizeau interferometers

Torsten Glaschke; Leslie L. Deck; Peter J. de Groot

doi:10.1117/12.2317630

7 August 2018 Characterizing the resolving power of laser Fizeau interferometers

Torsten Glaschke, Leslie L. Deck, Peter J. de Groot

Proceedings Volume 10829, Fifth European Seminar on Precision Optics Manufacturing; 1082905 (2018) https://doi.org/10.1117/12.2317630
Event: Fifth European Seminar on Precision Optics Manufacturing, 2018, Teisnach, Germany

Abstract

Optical fabrication relies on precision metrology over a wide range of lateral scales. Consequently, an important performance parameter for Fizeau interferometers is the instrument transfer function (ITF), which specifies the system response as a function of surface spatial frequency. Advances in test procedures, instruments and automated analysis techniques now enable reliable ITF characterization independent of many traditional sources of error. Results here show the ITF for a commercial 100-mm aperture interferometer with spatial frequency response ranging from 0 to 1500 cycles per aperture

Citation Download Citation

Torsten Glaschke, Leslie L. Deck, and Peter J. de Groot "Characterizing the resolving power of laser Fizeau interferometers", Proc. SPIE 10829, Fifth European Seminar on Precision Optics Manufacturing, 1082905 (7 August 2018); https://doi.org/10.1117/12.2317630

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