Paper
23 May 1989 Ultraviolet Quantum Efficiency And Vacuum Stability Of Ion-Implanted, Laser Annealed CCDS
R A. Stern, T Whittemore, M. Winzenread, M M Blouke
Author Affiliations +
Abstract
We present results of a program to enhance the ultraviolet and extreme ultraviolet response of charge-coupled devices (CCDs). The ultimate goal of our program is to develop a large format device with both high and stable quantum efficiency from 100-3000 Å which can be used as a windowless imaging detector in a space environment. Of particular concern in this environment and at these wavelengths is long-term photometric stability under hard vacuum. We will discuss quantum efficiency and vacuum stability measurements for a number of ion implanted and laser annealed test CCDs specially fabricated by Tektronix for this program.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R A. Stern, T Whittemore, M. Winzenread, and M M Blouke "Ultraviolet Quantum Efficiency And Vacuum Stability Of Ion-Implanted, Laser Annealed CCDS", Proc. SPIE 1071, Optical Sensors and Electronic Photography, (23 May 1989); https://doi.org/10.1117/12.952505
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CITATIONS
Cited by 9 scholarly publications and 1 patent.
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KEYWORDS
Charge-coupled devices

Quantum efficiency

Ultraviolet radiation

Ions

Optical sensors

Photography

Semiconducting wafers

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