Functional tolerancing using full surface metrology

Robert D. Grejda; Katherine Ballman; Chris A. Lee

doi:10.1117/12.2312199

28 May 2018 Functional tolerancing using full surface metrology

Robert D. Grejda, Katherine Ballman, Chris A. Lee

Proceedings Volume 10695, Optical Instrument Science, Technology, and Applications; 106950G (2018) https://doi.org/10.1117/12.2312199
Event: SPIE Optical Systems Design, 2018, Frankfurt, Germany

Abstract

This paper highlights two examples of the use of full surface metrology to allow for functional tolerancing of components in the areas of EUV lithography (reticle characterization) and DUV precision lens manufacturing (lens holder metrology). For both examples, the measurement of the full surface is a key enabler to understanding the critical characteristics to control and tolerance for functionality or performance. Interferometric techniques are used to provide high resolution and accurate measurements for both examples. Subsequently, this data can be used to identify the surface characteristics that contribute to the end functionality and provide a means for deterministic correction or compensation.

Citation Download Citation

Robert D. Grejda, Katherine Ballman, and Chris A. Lee "Functional tolerancing using full surface metrology", Proc. SPIE 10695, Optical Instrument Science, Technology, and Applications, 106950G (28 May 2018); https://doi.org/10.1117/12.2312199

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