Compensation of sampling error in frequency scanning interferometry

Yue Shang; Jiarui Lin; Linghui Yang; Yongjie Ren

doi:10.1117/12.2295243

12 January 2018 Compensation of sampling error in frequency scanning interferometry

Yue Shang, Jiarui Lin, Linghui Yang, Yongjie Ren

Proceedings Volume 10621, 2017 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 106210K (2018) https://doi.org/10.1117/12.2295243
Event: International Conference on Optical Instruments and Technology 2017, 2017, Beijing, China

Abstract

Absolute distance measurement techniques are of significant interest in the field of large volume metrology. Ones which could offer an ability of ADM and high accuracy will improve the efficiency and the quality of large assemblies. Frequency scanning interferometry (FSI) is a kind of ADM technique which use a variable synthetic-wavelength achieved by tuning the optical frequency continuously. FSI could offer a relative accuracy of several ppm in a range of tens of meters. In a FSI ranging system, it is necessary to get knowledge of the tuning range of optical frequency, which could be done by using of gas absorption cell, femtosecond laser comb, F-P etalon and the most used: a predicted auxiliary interferometer. As the result of the measurement is calculated by the tuning range of optical frequency, a length drift of the auxiliary interferometer will make a contribution in error of the result. Analysis of sampling error caused by the drift of the auxiliary interferometer has been done and a real-time compensation system has been proposed to minimize the drift of the auxiliary interferometer. The simulation has proved the analysis and the error has been decreased.

Citation Download Citation

Yue Shang, Jiarui Lin, Linghui Yang, and Yongjie Ren "Compensation of sampling error in frequency scanning interferometry", Proc. SPIE 10621, 2017 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 106210K (12 January 2018); https://doi.org/10.1117/12.2295243

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