Microfabrication of high performance optical diaphragm by plasma ion beam etching technology

Agnes Mestreau; Henri Bernardet; Guy Dancoing; Xavier Godechot; Christian Pezant; Vincent Stenger; Bernard Cousin; Pierre Etcheto; Georges Otrio

doi:10.1117/12.2326629

3 April 2018 Microfabrication of high performance optical diaphragm by plasma ion beam etching technology

Agnes Mestreau, Henri Bernardet, Guy Dancoing, Xavier Godechot, Christian Pezant, Vincent Stenger, Bernard Cousin, Pierre Etcheto, Georges Otrio

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Proceedings Volume 10570, International Conference on Space Optics — ICSO 1997; 1057023 (2018) https://doi.org/10.1117/12.2326629
Event: International Conference on Space Optics 1997, 1997, Toulouse, France

Abstract

This paper, “Microfabrication of high performance optical diaphragm by plasma ion beam etching technology," was presented as part of International Conference on Space Optics—ICSO 1997, held in Toulouse, France.

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Agnes Mestreau, Henri Bernardet, Guy Dancoing, Xavier Godechot, Christian Pezant, Vincent Stenger, Bernard Cousin, Pierre Etcheto, and Georges Otrio "Microfabrication of high performance optical diaphragm by plasma ion beam etching technology", Proc. SPIE 10570, International Conference on Space Optics — ICSO 1997, 1057023 (3 April 2018); https://doi.org/10.1117/12.2326629

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