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20 November 2017 NANOMEFOS non-contact measurement machine for aspheric and freeform optics
R. Henselmans, G. P. H. Gubbels, C. van Drunen, B. van Venrooy, J.A.P. Leijtens
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Proceedings Volume 10565, International Conference on Space Optics — ICSO 2010; 1056525 (2017) https://doi.org/10.1117/12.2309250
Event: International Conference on Space Optics—ICSO 2010, 2010, Rhodes Island, Greece
Abstract
Applying freeform optics in high-end optical systems can improve system performance while decreasing the system mass, size and number of required components. Their widespread application is however held back by the lack of a suitable metrology method. TNO, TU/e and NMi VSL have therefore developed the NANOMEFOS measurement machine [1], capable of universal non-contact and fast measurement of aspherical and freeform optics ranging from convex to concave and from flat to freeform, up to ⊘500 mm, with an uncertainty below 30 nm (2σ).
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R. Henselmans, G. P. H. Gubbels, C. van Drunen, B. van Venrooy, and J.A.P. Leijtens "NANOMEFOS non-contact measurement machine for aspheric and freeform optics", Proc. SPIE 10565, International Conference on Space Optics — ICSO 2010, 1056525 (20 November 2017); https://doi.org/10.1117/12.2309250
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KEYWORDS
Metrology
Calibration
Freeform optics
Aspheric lenses
Surface finishing
Astronomical imaging
Interferometers
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