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25 September 2017 Mechanical stress in dielectric mirrors: towards a fine control of the flatness
Thomas Begou, Julien Lumeau
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Proceedings Volume 10562, International Conference on Space Optics — ICSO 2016; 105621F (2017) https://doi.org/10.1117/12.2296090
Event: International Conference on Space Optics — ICSO 2016, 2016, Biarritz, France
Abstract
Today, the demand on flat optical components with specification on final surface flatness that must be smaller than ?/20 or ?/30 peak to valley, for various applications including linear accelerators [1,2], space applications [3]…, needs an accurate knowledge on the mechanical stress induced in thin films. In order to design correctly stacks of thin films on both side of a substrate and achieve perfect stress compensation, it is thus obvious that the first step is to precisely characterize the stress in single layers.
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Thomas Begou and Julien Lumeau "Mechanical stress in dielectric mirrors: towards a fine control of the flatness", Proc. SPIE 10562, International Conference on Space Optics — ICSO 2016, 105621F (25 September 2017); https://doi.org/10.1117/12.2296090
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KEYWORDS
Data modeling
Mirrors
Niobium
Astronomical imaging
Dielectric mirrors
Refractive index
Sputter deposition
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