Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging

Bin Guo; Antti Näsilä; Roberts Trops; Tahvo Havia; Ingmar Stuns; Heikki Saari; Anna Rissanen

doi:10.1117/12.2286438

22 February 2018 Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging

Bin Guo, Antti Näsilä, Roberts Trops, Tahvo Havia, Ingmar Stuns, Heikki Saari, Anna Rissanen

Author Affiliations +

Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450U (2018) https://doi.org/10.1117/12.2286438
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

Small, tunable MEMS Fabry-Perot interferometer (FPIs) have recently been demonstrated to enable hyperspectral imaging in mobile devices, so far using Bragg reflector mirror technologies, which however limit the device tuning range. This paper presents the realization of a novel MEMS FPI structure based on Ag thin film mirrors (AgMFPI), which allows tuning the entire visible - very near infrared (VNIR) wavelength range (for example 450 - 900 nm) with one single component. The characterized transmission of the components is 12 - 45% with full-width-half-maximum values (FWHM) between 11 - 18 nm using 2 mm optical aperture, while using 3 mm optical aperture results in FWHM values of 12 - 20 nm. A very compact hyperspectral imager can thus be built to cover this spectra by combining this AgMFPI and a typical RGB type of image sensor.

Conference Presentation

Citation Download Citation

Bin Guo, Antti Näsilä, Roberts Trops, Tahvo Havia, Ingmar Stuns, Heikki Saari, and Anna Rissanen "Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450U (22 February 2018); https://doi.org/10.1117/12.2286438

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