Advances toward submicron resolution optics for x-ray instrumentation and applications

Mark Cordier; Benjamin Stripe; Wenbing Yun; S. H. Lau; Alan Lyon; David Reynolds; Sylvia J. Y. Lewis; Sharon Chen; Vladimir A. Semenov; Richard I. Spink; Srivatsan Seshadri

doi:10.1117/12.2273094

23 August 2017 Advances toward submicron resolution optics for x-ray instrumentation and applications

Mark Cordier, Benjamin Stripe, Wenbing Yun, S. H. Lau, Alan Lyon, David Reynolds, Sylvia J. Y. Lewis, Sharon Chen, Vladimir A. Semenov, Richard I. Spink, Srivatsan Seshadri

Author Affiliations +

Proceedings Volume 10386, Advances in X-Ray/EUV Optics and Components XII; 103860D (2017) https://doi.org/10.1117/12.2273094
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

Sigray’s axially symmetric x-ray optics enable advanced microanalytical capabilities for focusing x-rays to microns-scale to submicron spot sizes, which can potentially unlock many avenues for laboratory micro-analysis. The design of these optics allows submicron spot sizes even at low x-ray energies, enabling research into low atomic number elements and allows increased sensitivity of grazing incidence measurements and surface analysis. We will discuss advances made in the fabrication of these double paraboloidal mirror lenses designed for use in laboratory x-ray applications. We will additionally present results from as-built paraboloids, including surface figure error and focal spot size achieved to-date.

Conference Presentation

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Mark Cordier, Benjamin Stripe, Wenbing Yun, S. H. Lau, Alan Lyon, David Reynolds, Sylvia J. Y. Lewis, Sharon Chen, Vladimir A. Semenov, Richard I. Spink, and Srivatsan Seshadri "Advances toward submicron resolution optics for x-ray instrumentation and applications", Proc. SPIE 10386, Advances in X-Ray/EUV Optics and Components XII, 103860D (23 August 2017); https://doi.org/10.1117/12.2273094

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