Preparation Of Transition Metal Sulfides Using Rf Plasma

Donald M. Schleich; Robert Gieger; Richard McManus; John N. Carter

doi:10.1117/12.951023

15 March 1989 Preparation Of Transition Metal Sulfides Using Rf Plasma

Donald M. Schleich, Robert Gieger, Richard McManus, John N. Carter

Proceedings Volume 1037, Monitoring and Control of Plasma-Enhanced Processing of Semiconductors; (1989) https://doi.org/10.1117/12.951023
Event: SPIE Advanced Processing Technologies for Optical and Electronic Devices (colocated wth OPTCON), 1988, Santa Clara, CA, United States

Abstract

The preparation of transition metal chalcogenides using classical techniques is often confronted with serious problems. We have studied the preparation of a variety of transition metal sulfides, as thin films and bulk powders, comparing thermal and rf plasma techniques. The rf plasma approach allows us to use a simple sulfurizing agent H₂S to prepare materials at low temperature. Without the aid of the rf plasma we must use either exotic sulfurizing agents or higher temperatures, which may have detrimental affects on the materials. Specifically we have studied the preparation of TiS₂, MoS_x and VS_x. In all cases we have been able to prepare films or bulk powders at temperatures below 2500C.

Citation Download Citation

Donald M. Schleich, Robert Gieger, Richard McManus, and John N. Carter "Preparation Of Transition Metal Sulfides Using Rf Plasma", Proc. SPIE 1037, Monitoring and Control of Plasma-Enhanced Processing of Semiconductors, (15 March 1989); https://doi.org/10.1117/12.951023

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available