Interferometric measurement of rotationally symmetric aspheric surfaces

Michael F. Kuechel

doi:10.1117/12.720726

14 May 2007 Interferometric measurement of rotationally symmetric aspheric surfaces

Michael F. Kuechel

Proceedings Volume 10316, Optifab 2007: Technical Digest; 103160Q (2007) https://doi.org/10.1117/12.720726
Event: Optifab 2007, 2007, Rochester, New York, United States

Abstract

A new method for measuring the surface of aspheric optics using a combination of two interferometric technologies is presented. The metrology method provides a 3D measurement with high data density in a short measurement time without the need for special tooling. The measurement technique is inherently insensitive to ray trace error and can be used on the shop floor. It covers a large range of aspheric departures and delivers very small measurement uncertainties.

Citation Download Citation

Michael F. Kuechel "Interferometric measurement of rotationally symmetric aspheric surfaces", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160Q (14 May 2007); https://doi.org/10.1117/12.720726

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