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2 May 2005 Automatically high precision manufacturing technology for micro-optic subgroups; Techical Digest
Thomas Sure, Volker Guyenot, Michael Gerhardt
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Proceedings Volume 10315, Optifab 2005: Technical Digest; 1031505 (2005) https://doi.org/10.1117/12.605828
Event: Optifab 2005, 2005, Rochester, NY, United States
Abstract
To realize the image quality of high end objectives, e. g. high NA microscope objectives working in the DUV spectral region the subgroups have to be manufactured with a mechanical precision which is difficult to achieve cost effectively. For high end microscope objectives the accuracy of the diameter of the lens mount must be within 1 µm, the run-out must be met within 1 µm and the distance of the lens vertex relative to the shoulder of the mount must fit within 1 µm. To realize the required precision, today various measurement techniques and production processes are used. Picking up the subgroups on different machining tools and measurement systems will loosen the accuracy. Here, we present the concept and the layout of a new manufacturing tool where we implemented the different measurement techniques in one CNC machining center.
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Thomas Sure, Volker Guyenot, and Michael Gerhardt "Automatically high precision manufacturing technology for micro-optic subgroups; Techical Digest", Proc. SPIE 10315, Optifab 2005: Technical Digest, 1031505 (2 May 2005); https://doi.org/10.1117/12.605828
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KEYWORDS
Manufacturing
Micro optics
Objectives
Microscopes
Deep ultraviolet
Image quality
Precision measurement
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