Polishing rate of fused silica, compared to glasses BK7 and SF6

John C. Lambropoulos

doi:10.1117/12.2284015

19 May 2003 Polishing rate of fused silica, compared to glasses BK7 and SF6

John C. Lambropoulos

Proceedings Volume 10314, Optifab 2003: Technical Digest; 103140Q (2003) https://doi.org/10.1117/12.2284015
Event: OptiFab 2003, 2003, Rochester, NY, United States

Abstract

We discuss micromechanics contributions to the loose abrasive polishing removal rate in fused silica, and the multicomponent glasses (crown) BK7 and (flint) SF6. Nanoindentation reveals the contributions of hardness at depths in the range 2-6 nm.

Citation Download Citation

John C. Lambropoulos "Polishing rate of fused silica, compared to glasses BK7 and SF6", Proc. SPIE 10314, Optifab 2003: Technical Digest, 103140Q (19 May 2003); https://doi.org/10.1117/12.2284015

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