A vertical bi-directional electrostatic comb driver for optical MEMS devices

S. He

doi:10.1117/12.2283961

29 August 2017 A vertical bi-directional electrostatic comb driver for optical MEMS devices

S. He

Proceedings Volume 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging; 103134L (2017) https://doi.org/10.1117/12.2283961
Event: Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 2002, Ottawa, Ontario, Canada

Abstract

Micro electrostatic actuators play an important role in driving optical MEMS devices such as spatial light modulators, micro mirrors, and MEMS tunable lasers. The wide acceptance of electrostatic actuators is due in large to the fact that they are simple, they offer a fast response and low power consumption, and are potentially cheap when high volume is involved [ l ] -[3 ] .

Citation Download Citation

S. He "A vertical bi-directional electrostatic comb driver for optical MEMS devices", Proc. SPIE 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 103134L (29 August 2017); https://doi.org/10.1117/12.2283961

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