ECR-PECVD silicon oxynitride thin films for flat panel displays

Richard Wood

doi:10.1117/12.2283927

29 August 2017 ECR-PECVD silicon oxynitride thin films for flat panel displays

Richard Wood

Proceedings Volume 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging; 103133N (2017) https://doi.org/10.1117/12.2283927
Event: Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 2002, Ottawa, Ontario, Canada

Abstract

Electrical and Material properties of dielectric thin films of silicon oxynitride, deposited at low substrate temperatures using an ultrahigh vacuum electron cyclotron resonance plasma enhanced chemical vapour deposition (ECR-PECVD) system have been examined using X-Ray Photon Spectroscopy (XPS), Nuclear Reaction Analysis (NRA), Elastic Recoil Detection (ERD) and chemical etching. Electrical properties, capacitance and dielectric breakdown field strengths of these films are found to be comparable to films deposited in systems utilizing ion assist physical vapour deposition (PVD) and sputtering. Thin film electroluminescent devices incorporating ECR SiON dielectrics demonstrate high brightness and superior breakdown characteristics.

Citation Download Citation

Richard Wood "ECR-PECVD silicon oxynitride thin films for flat panel displays", Proc. SPIE 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 103133N (29 August 2017); https://doi.org/10.1117/12.2283927

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available