Investigation of the phase formation from nickel coated nanostructured silicon

Yulia I. Shilyaeva; Olga V. Pyatilova; Alexandra Yu. Berezkina; Artem V. Sysa; Alexander A. Dudin; Dmitry I. Smirnov; Sergey A. Gavrilov

doi:10.1117/12.2264593

30 December 2016 Investigation of the phase formation from nickel coated nanostructured silicon

Yulia I. Shilyaeva, Olga V. Pyatilova, Alexandra Yu. Berezkina, Artem V. Sysa, Alexander A. Dudin, Dmitry I. Smirnov, Sergey A. Gavrilov

Author Affiliations +

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102240E (2016) https://doi.org/10.1117/12.2264593
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

In this paper, the influence of the conditions of chemical and electrochemical nickel plating of nanostructured silicon and subsequent heat treatment on the phase composition of Si/Ni structures with advanced interface is studied. Nanostructured silicon formed by chemical and electrochemical etching was used for the formation of a developed interphase surface. The resulting Si/Ni samples were analyzed using scanning electron microscopy, energy dispersive X-ray analysis, and X-ray phase analysis. The experiments have revealed the differences in phase composition of the Si/Ni structures obtained by different methods, both before and after heat treatment.

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Yulia I. Shilyaeva, Olga V. Pyatilova, Alexandra Yu. Berezkina, Artem V. Sysa, Alexander A. Dudin, Dmitry I. Smirnov, and Sergey A. Gavrilov "Investigation of the phase formation from nickel coated nanostructured silicon", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102240E (30 December 2016); https://doi.org/10.1117/12.2264593

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