Paper
11 April 1989 Surface Modulations On Metaloptics Caused By Vibrations In The Microturning Respectively Fly-Cutting Process
M. Weck, K. Modemann
Author Affiliations +
Proceedings Volume 1015, Micromachining Optical Components and Precision Engineering; (1989) https://doi.org/10.1117/12.949448
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
The requirements for surface quality of workpieces such as metal-optics are increasing, specially if they are used as optics in high energy laser systems. This fact leads to an ongoing optimization effort of the microturning respectively fly-cutting process with a single point diamond tool. A selection of insufficiently machined workpieces has demonstrated that vibrations at the cutting zone modulate the surface contour. Recent measurements have shown that the static and dynamic compliance of ultraprecision machines has a great influence on these effects. In the past several ultraprecision machines have been studied and the results are presented here statistically. Further examinations have pointed out that it is possible to correlate the measured vibration amplitudes at tool and headstock during the cutting process with the generated texture on the workpiece.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Weck and K. Modemann "Surface Modulations On Metaloptics Caused By Vibrations In The Microturning Respectively Fly-Cutting Process", Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989); https://doi.org/10.1117/12.949448
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KEYWORDS
Modulation

Spindles

Phase shifts

Micromachining

Optical components

Mirrors

Modal analysis

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