This paper will present a smart and efficient working flow that can map inspection data back onto a design and produce more diverse monitor points for inspection, and each set of monitor points links to a set of statistical design data that shows insight on design structures that are more sensitive to the process variations. A full-chip post-processing flow is also implemented to process design layout so that the particular patterns that may cause certain function blocks to fail can be directly checked on post-processed layout. |
ACCESS THE FULL ARTICLE
No SPIE Account? Create one
Inspection
Manufacturing
Silicon
Optical proximity correction
Structural design
Data processing
Databases