Author Affiliations +
Kaustuve Bhattacharyya,1 Arie den Boef,1 Marc Noot,1 Omer Adam,1 Grzegorz Grzela,1 Andreas Fuchs,1 Martin Jak,1 Sax Liao,1 Ken Chang,1 Vincent Couraudon,1 Eason Su,1 Wilson Tzeng,1 Cathy Wang,1 Christophe Fouquet,1 Guo-Tsai Huang,2 Kai-Hsiung Chen,2 Y. C. Wang,2 Kevin Cheng,2 Chih-Ming Ke,2 L. G. Terng2
1ASML Netherlands B.V. (Netherlands)
2Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)