Strategies for rapid and reliable fabrication of microoptical structures using two-photon polymerization

Sönke Steenhusen; Sebastian Hasselmann; Gerhard Domann

doi:10.1117/12.2252913

20 February 2017 Strategies for rapid and reliable fabrication of microoptical structures using two-photon polymerization

Sönke Steenhusen, Sebastian Hasselmann, Gerhard Domann

Author Affiliations +

Proceedings Volume 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X; 101150S (2017) https://doi.org/10.1117/12.2252913
Event: SPIE OPTO, 2017, San Francisco, California, United States

Abstract

Two-Photon Polymerization (2PP) has attracted broad interest for the fabrication of microoptical elements due to its design flexibility and precision. Along with tailored hybrid polymers a higher level of functional integration and new application concepts are enabled. As the entire volume of the desired 3D structure is filled in a point-by-point fashion, the fabrication can require several days inhibiting the adoption of 2PP as an additive manufacturing process at industrial level. We review different strategies to overcome the limitation in throughput and their impact on the patterning result. Particularly, processing using galvoscanner technology and replication of 2PP structures are highlighted.

Citation Download Citation

Sönke Steenhusen, Sebastian Hasselmann, and Gerhard Domann "Strategies for rapid and reliable fabrication of microoptical structures using two-photon polymerization", Proc. SPIE 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 101150S (20 February 2017); https://doi.org/10.1117/12.2252913

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