Paper
21 March 1989 Surface Smoothing Effects And Optical Scatter Characteristics Of Coated Metal Surfaces
J. R. McNeil, G. A. Al-Jumaily, J. M. Bennett
Author Affiliations +
Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949165
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
Deposition of thin (0.1 to 1.0 micron thick) metal films on smooth surfaces can cause a reduction in microroughness and related optical scatter. The effect is more apparent for films which have been deposited using energetic processes, such as ion bombardment and sputtering, compared to evaporated films. The amount of smoothing is also dependent upon the initial roughness of the surface and the film material. Results from examining surfaces using several characterization techniques will be discussed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. R. McNeil, G. A. Al-Jumaily, and J. M. Bennett "Surface Smoothing Effects And Optical Scatter Characteristics Of Coated Metal Surfaces", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); https://doi.org/10.1117/12.949165
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KEYWORDS
Copper

Surface finishing

Polishing

Spatial frequencies

Coating

Ions

Molybdenum

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