The Development Of ESPI With View-Points Of Optical System Set-Ups

Ming-Wen Chang

doi:10.1117/12.947603

16 January 1989 The Development Of ESPI With View-Points Of Optical System Set-Ups

Ming-Wen Chang

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947603
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

The basics, the working principle, the advantages, and the names of ESPI are reviewed. Syntheses and analyses of the optical system set-ups, emphasizing the speckle reference ESPI, of the past and present developments are made. Future development directions are discussed. The optical system set-up requirements and techniques are listed and emphasized. Light economy analyzing method is described and Michelson-type speckle reference ESPI set-up and two other new set-ups are analyzed.

Citation Download Citation

Ming-Wen Chang "The Development Of ESPI With View-Points Of Optical System Set-Ups", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947603

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