Profilometry In The Angstrom Region

Jacob Politch

doi:10.1117/12.947602

16 January 1989 Profilometry In The Angstrom Region

Jacob Politch

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947602
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

An interferometric system, based on heterodyne principle is described and which enables profile measurements of a surface with a high accuracy. It is possible to measure height variations of 4 Angstroms with a spatial resolution of 1 micrometer. Fran the surface height measurements, there were calculated its statistical properties, such as the R of the heights, the slopes and also its spectral density. The last one identifies the spatial frequencies of the surface, caused for example by the diamond turning mad-line and also by the measuring maChine. For an electro-magnetic wave with a Gaussian profile, which is incident the surface under test, the reflected complex field amplitude (CFA) near the focal region was calculated. jibe have defined the "Macroscopic wavelength" A, which was found to be constant for variations ▵z of the focal distance from the plane under test, for variations of the bean diameter w_o in the focal region, while the complex index of refraction (CIF) of the surface under test was kept constant.

Citation Download Citation

Jacob Politch "Profilometry In The Angstrom Region", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947602

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KEYWORDS

Heterodyning

Interferometers

Optical testing

Spatial resolution

Photodetectors

Beam splitters

Refraction

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