An Improved Fourier Transform Profilometry

Xian-Yu Su; Jian Li; Lu-Rong Guo; Wan-Yong Su

doi:10.1117/12.947595

16 January 1989 An Improved Fourier Transform Profilometry

Xian-Yu Su, Jian Li, Lu-Rong Guo, Wan-Yong Su

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947595
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

An improved Fourier transform profilometry for the automatic mesurement of 3-D object shapes is presented. Because of using a defocused Rouchi grating to get a qusi-sinusoidal optical field and using grating π-phase shifting technique, the fundarmental spectrum modulated by 3-D object shapes can be extended from 0 to 2f. theorily Cf. is the carrier frequency of the optical field). Consequently,the measurable rate of hight variation can be extended three times more than the unimproved FTP. This article gives the theory and experiment results of the improved FTP.

Citation Download Citation

Xian-Yu Su, Jian Li, Lu-Rong Guo, and Wan-Yong Su "An Improved Fourier Transform Profilometry", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947595

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