Diagnostic Techniques For Studying Excimer Laser Kinetics

W D Kimura; F Kannari; J F Seamans; D R Guyer

doi:10.1117/12.944389

12 July 1988 Diagnostic Techniques For Studying Excimer Laser Kinetics

W D Kimura, F Kannari, J F Seamans, D R Guyer

Proceedings Volume 0894, Gas Laser Technology; (1988) https://doi.org/10.1117/12.944389
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

Several novel diagnostic techniques have been used to analyze the laser kinetics occurring in electron-beam pumped excimer lasers. Described are a quadrature interferometer for measuring time-dependent electron densities, an overtone absorption technique for measuring the HC1 concentration, a broadband dye laser system for measuring the spectrally resolved gain in XeF, and a hook interferometer for measuring time-dependent excited state densities. These techniques can also be applied to other non-excimer lasers.

Citation Download Citation

W D Kimura, F Kannari, J F Seamans, and D R Guyer "Diagnostic Techniques For Studying Excimer Laser Kinetics", Proc. SPIE 0894, Gas Laser Technology, (12 July 1988); https://doi.org/10.1117/12.944389

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available