Study And Application Of Soft X-Ray Emission From Laser-Produced Plasmas

M. Chaker; H. Pepin; V. Bareau; B. Lafontaine; I. Toubhans,; R. Fabbro; J. F. Currie

doi:10.1117/12.965043

4 February 1988 Study And Application Of Soft X-Ray Emission From Laser-Produced Plasmas

M. Chaker, H. Pepin, V. Bareau, B. Lafontaine, I. Toubhans,, R. Fabbro, J. F. Currie

Proceedings Volume 0831, X-Rays from Laser Plasmas; (1988) https://doi.org/10.1117/12.965043
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Laser created X-ray sources have been investigated both theoretically and experimentally using X = 1.06 pi and X = 0.26 wm and short pulses (T = 0.5 nsec). We also report the first detailed X-ray measurements using a low energy commercially available KrF laser (τ = 25 nsec). The conversion efficiency is given for various target atomic numbers and a large range of laser intensities. Finally, we introduce lithographic considerations and examine the laser requirements for an X-ray lithography source acceptable for industrial applications.

Citation Download Citation

M. Chaker, H. Pepin, V. Bareau, B. Lafontaine, I. Toubhans,, R. Fabbro, and J. F. Currie "Study And Application Of Soft X-Ray Emission From Laser-Produced Plasmas", Proc. SPIE 0831, X-Rays from Laser Plasmas, (4 February 1988); https://doi.org/10.1117/12.965043

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available