Grazing Incidence Reflectance Of SiC Films Produced By Plasma-Assisted Chemical Vapor Deposition

Ritva A. M. Keski-Kuha; John F. Osantowski; Albert R. Toft; William D. Partlow

doi:10.1117/12.942196

9 August 1988 Grazing Incidence Reflectance Of SiC Films Produced By Plasma-Assisted Chemical Vapor Deposition

Ritva A. M. Keski-Kuha, John F. Osantowski, Albert R. Toft, William D. Partlow

Proceedings Volume 0830, Grazing Incidence Optics for Astronomical and Laboratory Applications; (1988) https://doi.org/10.1117/12.942196
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

The grazing incidence reflectance of silicon carbide films produced by plasma-assisted chemical vapor deposition has been evaluated in the spectral region from 256 to 1216 Å. The results show that reflectivities higher than conventional coatings can be obtained on coatings deposited both on silicon wafers and quartz substrates. Potential application of silicon carbide films for EUV astronomical instruments will be discussed.

Citation Download Citation

Ritva A. M. Keski-Kuha, John F. Osantowski, Albert R. Toft, and William D. Partlow "Grazing Incidence Reflectance Of SiC Films Produced By Plasma-Assisted Chemical Vapor Deposition", Proc. SPIE 0830, Grazing Incidence Optics for Astronomical and Laboratory Applications, (9 August 1988); https://doi.org/10.1117/12.942196

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available