Recent Advances In Interferometry At Zygo

R. A. Smythe; J. A. Soobitsky; B. E. Truax

doi:10.1117/12.941758

23 March 1987 Recent Advances In Interferometry At Zygo

R. A. Smythe, J. A. Soobitsky, B. E. Truax

Proceedings Volume 0816, Interferometric Metrology; (1987) https://doi.org/10.1117/12.941758
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

This paper will discuss some of the recent advances in the field of interferometry that have been made at Zygo. In the past year Zygo has introduced five major advances in the interferometry field: the 5500 Heterodyne Profiler, the AXIOM 2/20 distance measuring interferometer, a 450mm phase modulator for large aperture phase interferometry, a phase measuring interferometer at 351nrn and the Mark IV programmable phase measuring interferometer. The presentation will conclude with a general discussion of what Zygo sees for the future of interferometry.

Citation Download Citation

R. A. Smythe, J. A. Soobitsky, and B. E. Truax "Recent Advances In Interferometry At Zygo", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); https://doi.org/10.1117/12.941758

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