Excimer Laser Processing Of Thin Metallic Films On Dielectric Substrates

U. Sowada; H. J. Kahlert; D. Basting

doi:10.1117/12.941237

22 September 1987 Excimer Laser Processing Of Thin Metallic Films On Dielectric Substrates

U. Sowada, H. J. Kahlert, D. Basting

Proceedings Volume 0801, High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics; (1987) https://doi.org/10.1117/12.941237
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

In addition to the conventional use of metal coatings on glass for mirrors, the electrical and electronic industries have increasing demand for patterned metal films on polymer substrates.

Citation Download Citation

U. Sowada, H. J. Kahlert, and D. Basting "Excimer Laser Processing Of Thin Metallic Films On Dielectric Substrates", Proc. SPIE 0801, High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics, (22 September 1987); https://doi.org/10.1117/12.941237

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available