Vibration Control For Ultraprecision Motion Machineries

Akira Kanai; Masakazu Miyashita; Junichi Yoshioka; Fukuo Hashimoto

doi:10.1117/12.937918

26 August 1987 Vibration Control For Ultraprecision Motion Machineries

Akira Kanai, Masakazu Miyashita, Junichi Yoshioka, Fukuo Hashimoto

Proceedings Volume 0732, 1st Intl Conf on Vibration Control in Optics and Metrology; (1987) https://doi.org/10.1117/12.937918
Event: 1st International Conference on Vibrational Control in Optics and Metrology, 1987, London, United Kingdom

Abstract

Development of ultraprecision machines requires motion mechanisms with dynamic characteristics being sufficiently resistive to environmental disturbances as well as vibration control devices isolating from them. In the paper active application of frictional forces to the machines are proposed in viewpoint of this point. Further, new strategies for various problems resulting from application of frictional forces are also proposed for linear feed mechanism and the test results are shown. They are load compensation unit, composite bearing guideway and force operation feed mechanism.

Citation Download Citation

Akira Kanai, Masakazu Miyashita, Junichi Yoshioka, and Fukuo Hashimoto "Vibration Control For Ultraprecision Motion Machineries", Proc. SPIE 0732, 1st Intl Conf on Vibration Control in Optics and Metrology, (26 August 1987); https://doi.org/10.1117/12.937918

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