High Power Picosecond KRF Laser System

Shuntaro Watanabe; Akira Endoh; Masayoshi Watanabe

doi:10.1117/12.937292

11 March 1987 High Power Picosecond KRF Laser System

Shuntaro Watanabe, Akira Endoh, Masayoshi Watanabe

Proceedings Volume 0710, Excimer Lasers and Optics; (1987) https://doi.org/10.1117/12.937292
Event: Cambridge Symposium-Fiber/LASE '86, 1986, Cambridge, MA, United States

Abstract

Picosecond amplification characteristics were investigated in KrF amplifiers with aperture sizes of 2xlcm2 and 7x7cm2. The system including a ps pulse generator, two 2xlcm2-aperture lasers and a 7x7cm2-aperture laser was successfully operated with the precise synchronism, resulting in an output energy of 150 mJ.

Citation Download Citation

Shuntaro Watanabe, Akira Endoh, and Masayoshi Watanabe "High Power Picosecond KRF Laser System", Proc. SPIE 0710, Excimer Lasers and Optics, (11 March 1987); https://doi.org/10.1117/12.937292

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